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E-MST-XY-110X110 Industrial measurement microscope scanning stage
industrial microscope linear motor platform is a product specially designed and developed for mainstream research-level inverted microscopes.
It has the advantages of better precision, faster response, higher speed and longer life. Moreover, since the linear motor is a non-contact direct drive mechanism, it is almost noiseless, and is a traditional display motor.
An optimized and upgraded product of the micromirror platform. -
MiniSCAN desktop scanning stage
iniSCAN series MiniSCAN series is a high-precision desktop scanning system recently launched by our company. The whole machine adopts a marble base with excellent stability, equipped with high-precision XY and Z-axis motion stages, and has reserved light path installation and lighting. The mechanism can be very quickly combined into various applications that meet customer requirements. Currently, it has very successful application cases in high-precision applications such as semiconductor wafer scanning, biological detection, and interferometer measurement. Main features of MiniSCAN series Standard desktop-level vibration isolation system Three-axis optional high-precision linear motor or high-stability stepper motor motion stage The drive control system has been embedded in the entire machine structure, no additional control box is required Customized lighting and imaging mechanisms can be selected according to customer requirements Optional high-precision ranging module to achieve 0.2um level autofocus Optional standard control software, as well as a complete, rich and fast secondary development package
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E-LMTE390-XY-330X330 Large travel hollow linear motor stage
It is used in large hollow microscopes and is widely used in semiconductor inspection.
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E-NFZ240-Z series (Z-axis high-precision linear motor stage)
● Design Features
● Designed for high-performance scanning and inspection
● Active air preload on all air-bearing surfaces
● Linear encoder feedback provides sub-nanometer resolution
● High stiffness for heavy loads and excellent geometrical performance
● with travels from 50 and 100 mm
● Integral counterbalance
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E-LMT145-Z (High precision Nano Motorized Stage) Vertical Z axis Linear Motor Stage
● Design Features
● Designed for high-performance scanning and inspection
● Active air preload on all air-bearing surfaces
● Linear encoder feedback provides sub-nanometer resolution
● High stiffness for heavy loads and excellent geometrical performance
● with travels from 50 and 100 mm
● Integral counterbalance
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E-Linear motor stage and controller ELMT-MINIXY
ELMT-MINIXY series has extremely compact dimensions and excellent dynamic performance, especially suitable for those who are sensitive to space size, At the same time, it is hoped to have a larger stroke and higher precision application scenarios.
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E-SST160-Z50 Z-axis stepper motor lifting table
● Vertical motion range 25 or 30mm
● min step to 100nm
● load capacity to 6 kg
● Direct-measuring linear encoder option
● Stepper motor drive
● cross ball rails
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E-ABVT-Z Vertical axis air bearing stage
● Vertical motion range 20 or 38mm (1/2″)
● Positioning repeatability to 10nm
● load capacity to 6 kg
● Direct-measuring linear encoder option
● Voice motor drive
● Air bearing rails, cross ball rails can also be used
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E-GLMT-XY (High Precision Linear Motor Stage) XY Linear motor stage
● Linear motors
● Linear motors are electromagnetic direct drives. They dispense with mechanical components in the drivetrain and transfer the drive force directly and friction-free to the motion platform. The drives reach high velocities and accelerations. Ironless motors are particularly suitable for positioning tasks with the highest demands on precision because there is no undesirable interaction with the permanent magnets. This allows smooth running even at the lowest velocities and at the same time, there is no vibration at high velocities. Nonlinearity in control behavior is avoided and any position can be controlled easily. The drive force can be set freely.
